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What's The Thermal Anemometer

What's The Thermal Anemometer

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  • Time of issue:2022-05-30
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What's The Thermal Anemometer

(Summary description)

  • Categories:News Center
  • Author:
  • Origin:
  • Time of issue:2022-05-30
  • Views:0
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win flow meter

 

MEMS ( micro-electro-mechanical system ) acceleration sensor is one of the earliest sensors to be studied in MEMS field. After years of development, the design and processing technology of MEMS acceleration sensor has become increasingly mature. According to the different sensing mechanism, MEMS accelerometer can be divided into piezoresistive, thermal airflow, resonant and capacitive.

Thermal airflow and capacitive MEMS accelerometers are the most widely used MEMS accelerometers due to their mature technology and strong environmental adaptability.

For the principle of thermal airflow acceleration sensor, many people feel incredible. In fact, we can simplify the system and imagine a heated ' bubble ' in a closed cavity. This hot ' bubble ' is the so-called acceleration ' detection quality '.

When the object moves at a certain acceleration, the ‘ bubble ’ must move in the opposite direction relative to the cavity under the inertial effect. At this point, the thermocouple symmetrically distributed around the cavity can sense the change of temperature difference, and then the change can be converted into electrical signal output by using the Wheatstone bridge.

 

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